The Master Program of Engineering Physics (MoEP) at ITS has been in existence since 2008, established through the Decree of the Directorate General of Higher Education (DIKTI) No. 2202/D/T/2008 dated 15 July 2008. The program combines engineering concepts with a strong mastery of Physics and Mathematics to produce creative and innovative applications. Students are equipped with research and development, design, and analysis capabilities for a wide range of industrial physical systems.

Two fields of specialization are available: Industrial Instrumentation Engineering (IIE) and Renewable Energy Technology (RET). The RET specialization was introduced in 2010 with support from the Post Graduate Programme Renewable Energy (PPRE), University of Oldenburg, Germany.

The program is carried out over 4 semesters (2 years), with a maximum study period of 4 years and a minimum load of 36 credits including the thesis. Before entering a specialization, students complete 16 credits of general compulsory courses; the IIE track then comprises 14 compulsory and 6 elective credits, while the RET track comprises 15 compulsory and 6 elective credits.

The program holds national accreditation for the 2023–2028 period as well as international ASIIN accreditation, and is supported by research partnerships across Asia, Europe, Australia, the Americas, and Africa.