{"id":21450,"date":"2015-10-05T23:18:23","date_gmt":"2015-10-05T23:18:23","guid":{"rendered":"https:\/\/www.its.ac.id\/news\/2015\/10\/05\/keutamaan-mems-dalam-elektronika-ukuran-mikro\/"},"modified":"2015-10-05T23:18:23","modified_gmt":"2015-10-05T23:18:23","slug":"keutamaan-mems-dalam-elektronika-ukuran-mikro","status":"publish","type":"post","link":"https:\/\/www.its.ac.id\/news\/keutamaan-mems-dalam-elektronika-ukuran-mikro\/","title":{"rendered":"Keutamaan MEMS dalam Elektronika Ukuran Mikro"},"content":{"rendered":"<div>Paddy menjelaskan, dalam integrasi <em>micromachining <\/em>ini dirinya mengintegrasikan antara <em>Micro Electro Mechanical Systems<\/em> (MEMS) dengan kombinasi dari sensor dan penggiat elektronik dimana MEMS juga mencakup didalam kombinasi ini.<\/div>\n<div><\/div>\n<div>MEMS adalah sebuah proses teknologi yang digunakan untuk membuat perangkat terintegrasi dalam ukuran kecil. MEMS juga bisa dibilang sistem yang menggabungkan komponen mekanik dan listrik. &quot;Perangkat ini dibuat menggunakan sirkuit terpadu (IC) dengan beberapa teknik pemrosesan,&quot;&nbsp;terang Paddy.<\/div>\n<div><\/div>\n<div>Pada umumnya MEMS terdiri dari struktur mikro-mekanik, mikro-sensor, mikro-akuator, dan mikro-elektronika. Dimana semuanya terintegrasi kedalam sebuah chip silikon.&nbsp;&quot;Perangkat &nbsp;MEMS ini memiliki kemampuan untuk merasakan, mengontrol, dan berjalan pada skala mikro, serta menghasilkan efek pada skala makro,&quot;&nbsp;ujarnya.<\/div>\n<div><\/div>\n<div>Dalam dunia industri MEMS bisa juga diaplikasikan dalam berbagai bidang misalnya dalam bidang otomotif, elektronik, kesehatan, komunikasi dan pertahanan. Untuk bidang otomotif sendiri aplikasi mems bisa digunakan dalam sensor internal navigasi dan sensor pendingin kompresor. Sedangkan untuk elektronik dan pertahanan misalnya dengan sensor pendekteksian gempa bumi, dan <em>arming system<\/em>.<\/div>\n<div><\/div>\n<div>&quot;Bahan substrat dasar yang digunakan untuk membuat MEMS secara umum adalah silikon,&quot; terangnya. Silikon merupakan bahan yang jumlahnya sangat berlimpah serta murah. Selain itu kemampuan silikon untuk dapat disimpan dalam film tipis sangat sesuai untuk MEMS. Tidak hanya itu, bisa pula disimpan di grapen, plastic, polimer, kertas, SiC, dan lain sebagainya.<\/div>\n<div><\/div>\n<div>Adapun proses Fabrikasi MEMS diklasifikasikan menjadi tiga bagian, yaitu <em>bulk micromachining, surface micromachining <\/em>dan <em>high aspect ratio micromachining<\/em>. Adapun maksud dari <em>bulk micromachining<\/em> adalah struktur-truktur dibentuk dalam substrat silikon, sedangkan <em>surface micromachining<\/em> lapisan-lapisan mikromekanis dibentuk dari lapisan-lapisan dan film-film yang dideposisikan pada permukaan silikon. (ila\/akh).<\/div>\n","protected":false},"excerpt":{"rendered":"<p>Perkembangan Teknologi Elektronika terus dilakukan guna menciptakan sistem yang memiliki fleksibilitas dan efisiensi tinggi. Salah satunya dengan teknologi yang sering dilkembangkan adalah teknologi dengan ukuran mikro sampai nano. Untuk itu, <em>keynote speaker<\/em>, <em>The 2nd International Conference on Materials and Metallurgical Technology<\/em> (ICOMMET 2015), Prof Dr Paddy J French dari TU DELFT, Netherland, menjelaskan mengenai <em>Intregated Micromachining,<\/em> Senin (5\/10).<\/p>\n","protected":false},"author":1,"featured_media":21451,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[14],"tags":[],"class_list":["post-21450","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-berita-utama"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.1.1 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Keutamaan MEMS dalam Elektronika Ukuran Mikro - ITS News<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.its.ac.id\/news\/keutamaan-mems-dalam-elektronika-ukuran-mikro\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Keutamaan MEMS dalam Elektronika Ukuran Mikro - ITS News\" \/>\n<meta property=\"og:description\" content=\"Perkembangan Teknologi Elektronika terus dilakukan guna menciptakan sistem yang memiliki fleksibilitas dan efisiensi tinggi. Salah satunya dengan teknologi yang sering dilkembangkan adalah teknologi dengan ukuran mikro sampai nano. Untuk itu, keynote speaker, The 2nd International Conference on Materials and Metallurgical Technology (ICOMMET 2015), Prof Dr Paddy J French dari TU DELFT, Netherland, menjelaskan mengenai Intregated Micromachining, Senin (5\/10).\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.its.ac.id\/news\/keutamaan-mems-dalam-elektronika-ukuran-mikro\/\" \/>\n<meta property=\"og:site_name\" content=\"ITS News\" \/>\n<meta property=\"article:published_time\" content=\"2015-10-05T23:18:23+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.its.ac.id\/news\/wp-content\/uploads\/sites\/2\/2017\/11\/15424.jpeg\" \/>\n\t<meta property=\"og:image:width\" content=\"540\" \/>\n\t<meta property=\"og:image:height\" content=\"405\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"author\" content=\"Dadang ITS\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"Dadang ITS\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.its.ac.id\/news\/keutamaan-mems-dalam-elektronika-ukuran-mikro\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.its.ac.id\/news\/keutamaan-mems-dalam-elektronika-ukuran-mikro\/\"},\"author\":{\"name\":\"Dadang ITS\",\"@id\":\"https:\/\/www.its.ac.id\/news\/#\/schema\/person\/30d3fdc35e7f8f31c41abfd28db2eeb9\"},\"headline\":\"Keutamaan MEMS dalam Elektronika Ukuran Mikro\",\"datePublished\":\"2015-10-05T23:18:23+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.its.ac.id\/news\/keutamaan-mems-dalam-elektronika-ukuran-mikro\/\"},\"wordCount\":266,\"commentCount\":1,\"publisher\":{\"@id\":\"https:\/\/www.its.ac.id\/news\/#organization\"},\"image\":{\"@id\":\"https:\/\/www.its.ac.id\/news\/keutamaan-mems-dalam-elektronika-ukuran-mikro\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.its.ac.id\/news\/wp-content\/uploads\/sites\/2\/2017\/11\/15424.jpeg\",\"articleSection\":[\"Berita Utama\"],\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"CommentAction\",\"name\":\"Comment\",\"target\":[\"https:\/\/www.its.ac.id\/news\/keutamaan-mems-dalam-elektronika-ukuran-mikro\/#respond\"]}]},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.its.ac.id\/news\/keutamaan-mems-dalam-elektronika-ukuran-mikro\/\",\"url\":\"https:\/\/www.its.ac.id\/news\/keutamaan-mems-dalam-elektronika-ukuran-mikro\/\",\"name\":\"Keutamaan MEMS dalam Elektronika Ukuran Mikro - 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